MEMS for in situ mechanical characterization refers to microelectromechanical systems (MEMS) used to measure the mechanical properties (such as the Young’s modulus and fracture strength) of nanoscale specimens such as nanowires, nanorods, whiskers, nanotubes and thin films. They distinguish themselves from other methods of nanomechanical testing because the sensing and actuation mechanisms are embedded and/or co-fabricated in the microsystem, providing—in the majority of cases—greater sensitivity and precision.
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| - MEMS for in situ mechanical characterization refers to microelectromechanical systems (MEMS) used to measure the mechanical properties (such as the Young’s modulus and fracture strength) of nanoscale specimens such as nanowires, nanorods, whiskers, nanotubes and thin films. They distinguish themselves from other methods of nanomechanical testing because the sensing and actuation mechanisms are embedded and/or co-fabricated in the microsystem, providing—in the majority of cases—greater sensitivity and precision. (en)
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| - MEMS for in situ mechanical characterization refers to microelectromechanical systems (MEMS) used to measure the mechanical properties (such as the Young’s modulus and fracture strength) of nanoscale specimens such as nanowires, nanorods, whiskers, nanotubes and thin films. They distinguish themselves from other methods of nanomechanical testing because the sensing and actuation mechanisms are embedded and/or co-fabricated in the microsystem, providing—in the majority of cases—greater sensitivity and precision. This level of integration and miniaturization allows carrying out the mechanical characterization in situ, i.e., testing while observing the evolution of the sample in high magnification instruments such as optical microscopes, scanning electron microscopes (SEM), transmission electron microscopes (TEM) and X-ray setups. Furthermore, analytical capabilities of these instruments such as spectroscopy and diffraction can be used to further characterize the sample, providing a complete picture of the evolution of the specimen as it is loaded and fails. Owing to the development of mature MEMS microfabrication technologies, the use of these microsystems for research purposes has been increasing in recent years. Most of the current developments aim to implement in situ mechanical testing coupled with other type of measurements, such as electrical or thermal, and to extend the range of samples tested to the biological domain, testing specimens such as cells and collagen fibrils. (en)
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