Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems (MEMS). Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate. Whereas surface micromachining creates structures on top of a substrate, bulk micromachining produces structures inside a substrate.
| Attributes | Values |
|---|
| rdf:type
| |
| rdfs:label
| - Bulk micromachining (en)
- バルクマイクロマシニング (ja)
|
| rdfs:comment
| - バルクマイクロマシニングとは、MEMS(マイクロマシン)作製技術の一つ。基板もしくは厚膜(数十μm以上)を加工してMEMSデバイスを作製する技術の総称。(参考:サーフェイスマイクロマシニング) 主にSOI(Silicon On Insulator)ウエハや基板そのものを加工してデバイスを作製する。 従来は水酸化カリウム(KOH)や水酸化テトラメチルアンモニウム(TMAH)などを用いたウエットエッチングによる加工が主流であったが、ICP-RIEによる深掘りエッチングが可能となり、これが主流となった。ボッシュプロセスの発明により、シリコンに対する垂直な深掘りエッチングが可能となった。 (ja)
- Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems (MEMS). Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate. Whereas surface micromachining creates structures on top of a substrate, bulk micromachining produces structures inside a substrate. (en)
|
| dcterms:subject
| |
| Wikipage page ID
| |
| Wikipage revision ID
| |
| Link from a Wikipage to another Wikipage
| |
| Link from a Wikipage to an external page
| |
| sameAs
| |
| dbp:wikiPageUsesTemplate
| |
| has abstract
| - Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems (MEMS). Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate. Whereas surface micromachining creates structures on top of a substrate, bulk micromachining produces structures inside a substrate. Usually, silicon wafers are used as substrates for bulk micromachining, as they can be anisotropically wet etched, forming highly regular structures. Wet etching typically uses alkaline liquid solvents, such as potassium hydroxide (KOH) or tetramethylammonium hydroxide (TMAH) to dissolve silicon which has been left exposed by the photolithography masking step. These alkali solvents dissolve the silicon in a highly anisotropic way, with some crystallographic orientations dissolving up to 1000 times faster than others. Such an approach is often used with very specific crystallographic orientations in the raw silicon to produce V-shaped grooves. The surface of these grooves can be atomically smooth if the etch is carried out correctly, and the dimensions and angles can be precisely defined. Pressure sensors are usually created by bulk micromachining technique. Bulk micromachining starts with a silicon wafer or other substrates which is selectively etched, using photolithography to transfer a pattern from a mask to the surface. Like surface micromachining, bulk micromachining can be performed with wet or dry etches, although the most common etch in silicon is the anisotropic wet etch. This etch takes advantage of the fact that silicon has a crystal structure, which means its atoms are all arranged periodically in lines and planes. Certain planes have weaker bonds and are more susceptible to etching. The etch results in pits that have angled walls, with the angle being a function of the crystal orientation of the substrate. This type of etching is inexpensive and is generally used in early, low-budget research. (en)
- バルクマイクロマシニングとは、MEMS(マイクロマシン)作製技術の一つ。基板もしくは厚膜(数十μm以上)を加工してMEMSデバイスを作製する技術の総称。(参考:サーフェイスマイクロマシニング) 主にSOI(Silicon On Insulator)ウエハや基板そのものを加工してデバイスを作製する。 従来は水酸化カリウム(KOH)や水酸化テトラメチルアンモニウム(TMAH)などを用いたウエットエッチングによる加工が主流であったが、ICP-RIEによる深掘りエッチングが可能となり、これが主流となった。ボッシュプロセスの発明により、シリコンに対する垂直な深掘りエッチングが可能となった。 (ja)
|
| gold:hypernym
| |
| prov:wasDerivedFrom
| |
| page length (characters) of wiki page
| |
| foaf:isPrimaryTopicOf
| |
| is Link from a Wikipage to another Wikipage
of | |
| is Wikipage disambiguates
of | |
| is foaf:primaryTopic
of | |
![[RDF Data]](/fct/images/sw-rdf-blue.png)
![[cxml]](/fct/images/cxml_doc.png)
![[csv]](/fct/images/csv_doc.png)
![[text]](/fct/images/ntriples_doc.png)
![[turtle]](/fct/images/n3turtle_doc.png)
![[ld+json]](/fct/images/jsonld_doc.png)
![[rdf+json]](/fct/images/json_doc.png)
![[rdf+xml]](/fct/images/xml_doc.png)
![[atom+xml]](/fct/images/atom_doc.png)
![[html]](/fct/images/html_doc.png)