Harvey C. Nathanson (October 22, 1936 – November 22, 2019) was an American electrical engineer who invented the first MEMS (micro-electro-mechanical systems) device of the type now found in products ranging from iPhones to automobiles. MEMS devices, which are made using integrated circuit fabrication techniques, are composed of small moving mechanical elements that generally range from 1 to 100 micrometres (0.001 to 0.1 mm) in size. Typical MEMS devices include the accelerometers found in smartphones and video game controllers, and the gyroscopes used in automobiles and wearables.