About: Epitaxial wafer

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An epitaxial wafer (also called epi wafer, epi-wafer, or epiwafer) is a wafer of semiconducting material made by epitaxial growth (epitaxy) for use in photonics, microelectronics, spintronics, or photovoltaics. The epi layer may be the same material as the substrate, typically monocrystaline silicon, or it may be a more exotic material with specific desirable qualities.

Attributes	Values
rdf:type	Food
rdfs:label	Epitaxial wafer (en)
rdfs:comment	An epitaxial wafer (also called epi wafer, epi-wafer, or epiwafer) is a wafer of semiconducting material made by epitaxial growth (epitaxy) for use in photonics, microelectronics, spintronics, or photovoltaics. The epi layer may be the same material as the substrate, typically monocrystaline silicon, or it may be a more exotic material with specific desirable qualities. (en)
dcterms:subject	Semiconductor device fabrication
Wikipage page ID	1978796 (xsd:integer)
Wikipage revision ID	1023869809 (xsd:integer)
Link from a Wikipage to another Wikipage	Santa Clara, California Nitrogen Monocrystalline silicon List of semiconductor materials Molecular beam epitaxy Chemical vapor deposition Epitaxy Fraunhofer Society Gallium Gallium arsenide Gallium nitride Photovoltaic Photovoltaics Microelectronics Wafer (electronics) Ion implantation The Donning Company Aluminum Exotic material Thermal expansion Heterojunction Atmospheric pressure Arsenic Semiconductor device fabrication Phosphorus Solar cells Solar power Metal organic chemical vapor deposition IMEC Indium Saw Semiconductor Plasma-enhanced chemical vapor deposition Photonics Germanium Spintronics Silicon wafer Monocrystaline silicon
Link from a Wikipage to an external page	http://www.xtalsolar.com https://web.archive.org/web/20160304031210/http:/www.memc.com/assets/file/company/MEMC_book-optimized.pdf
sameAs	Epitaxial wafer Epitaxial wafer Epitaxial wafer Epitaxial wafer
dbp:wikiPageUsesTemplate	dbt:Cleanup dbt:Reflist
date	January 2017 (en)
reason	There exist more applications than mentioned yet (en)
has abstract	An epitaxial wafer (also called epi wafer, epi-wafer, or epiwafer) is a wafer of semiconducting material made by epitaxial growth (epitaxy) for use in photonics, microelectronics, spintronics, or photovoltaics. The epi layer may be the same material as the substrate, typically monocrystaline silicon, or it may be a more exotic material with specific desirable qualities. Silicon epi wafers were first developed around 1966, and achieved commercial acceptance by the early 1980s. Methods for growing the epitaxial layer on monocrystalline silicon or other wafers include: various types of chemical vapor deposition (CVD) classified as Atmospheric pressure CVD (APCVD) or metal organic chemical vapor deposition (MOCVD), as well as molecular beam epitaxy (MBE). Two "kerfless" methods (without abrasive sawing) for separating the epitaxial layer from the substrate are called "implant-cleave" and "stress liftoff". A method applicable when the epi-layer and substrate are the same material employs ion implantation to deposit a thin layer of crystal impurity atoms and resulting mechanical stress at the precise depth of the intended epi layer thickness. The induced localized stress provide a controlled path for crack propagation in the following cleavage step. In the dry stress lift-off process applicable when the epi-layer and substrate are suitably different materials, a controlled crack is driven by a temperature change at the epi/wafer interface purely by the thermal stresses due to the mismatch in thermal expansion between the epi layer and substrate, without the necessity for any external mechanical force or tool to aid crack propagation. It was reported that this process yields single atomic plane cleavage, reducing the need for post lift-off polishing, and allowing multiple reuses of the substrate up to 10 times. The epitaxial layers may consist of compounds with particular desirable features such as gallium nitride (GaN), gallium arsenide (GaAs), or some combination of the elements gallium, indium, aluminum, nitrogen, phosphorus or arsenic. (en)
gold:hypernym	Wafer
prov:wasDerivedFrom	wikipedia-en:Epitaxial_wafer?oldid=1023869809&ns=0
page length (characters) of wiki page	11306 (xsd:nonNegativeInteger)
foaf:isPrimaryTopicOf	wikipedia-en:Epitaxial_wafer
is rdfs:seeAlso of	Epitaxy
is Link from a Wikipage to another Wikipage of	Epistar Linear stage Wafer (electronics) Gallium nitride nanotube Joan Redwing Epi wafer Epiwafer SunEdison Solar cell Epi-wafer
is Wikipage redirect of	Epi wafer Epiwafer Epi-wafer
is foaf:primaryTopic of	wikipedia-en:Epitaxial_wafer

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